Corning Incorporated
POSITIONING DEVICES FOR RADIALLY POSITIONING SUBSTRATES WITH RESPECT TO AN AIR BEARING DEVICE

Abstract:

A substrate positioning device for radially positioning a substrate including a first mounting frame, and a plurality of centering devices coupled to the first mounting frame and spaced apart from one another. Each of the plurality of centering devices including a mount, a flexure element coupled to the mount and having a radial edge, and an adjustment member coupled to the mount. The adjustment member is adjusting between a retracted state and an extended state for pivoting the flexure element between a first position and a second position with respect to the mount. Each centering device is separately actuatable to move the flexure element of a respective centering device with respect to an edge of the substrate thereby radially positioning the substrate with respect to the first mounting frame.