Corning Incorporated
GLASS SUBSTRATES WITH BLIND VIAS HAVING DEPTH UNIFORMITY AND METHODS FOR FORMING THE SAME

Abstract:

A substrate comprising: (i) a first series of blind vias into a thickness of a substrate and open to a first primary surface; and (ii) a second series of blind vias into the thickness of a substrate and open to a second primary surface. Each blind via includes an interior wall. The interior wall includes a first tapered region and a second tapered region. The first tapered region and the second tapered region have a distinct slope. Each of the blind vias of the second series of blind vias is coaxial with a different blind via of the first series of blind vias. Each blind via of the first series of blind vias has a depth that deviates from a mean depth by less than +/-10%. Each blind via of the second series of blind vias has a depth that deviates from a mean depth by less than +/-10%.