Corning Incorporated
SCRIBING THIN CERAMIC MATERIALS USING BEAM FOCAL LINE

Abstract:

Embodiments of a method of scribing a ceramic material are provided. In the method, a ceramic material having a thickness of 500 .mu.m or less between a first outer surface and a second outer surface is provided. The second outer surface is opposite the first outer surface. A beam focal line is directed at the ceramic material, and the beam focal line has a length over which its intensity is greater than a damage threshold of the ceramic material. The length is longer than the thickness of the ceramic material. Further, a damage track defining at least a first section of the ceramic material and a second section of the ceramic material is created by moving the beam focal line relative to the ceramic material. Also provided are embodiments of a laser scribed component and embodiments of a laser scribed ceramic substrate.