Corning Incorporated
CURVED QUASI-NON-DIFFRACTING LASER BEAMS FOR LASER PROCESSING OF TRANSPARENT WORKPIECES

Abstract:

A method for processing a transparent workpiece comprises directing a laser beam oriented along a beam path into the transparent workpiece such that a portion of the laser beam directed into the transparent workpiece is a laser beam focal arc and generates an induced absorption within the transparent workpiece, the induced absorption producing a defect within the transparent workpiece. The laser beam focal arc has a wavelength .lamda., a spot size w.sub.0, and a Rayleigh range Z.sub.R that is greater than F D .pi. w 0 2 .lamda. , ##EQU00001## where F.sub.D is a dimensionless divergence factor having a value of 10 or greater. The laser beam focal arc varies in a line shift direction relative to an unaffected beam propagation direction, where the line shift direction extends in an x-direction, a y-direction, or both along a length of the laser beam focal arc, such that the defect varies in the line shift direction.