Corning Incorporated
PHASE-MODIFIED QUASI-NON-DIFFRACTING LASER BEAMS FOR HIGH ANGLE LASER PROCESSING OF TRANSPARENT WORKPIECES

Abstract:

A method for processing a transparent workpiece that includes directing a laser beam the transparent workpiece. The laser beam incident to the impingement surface has an oblong angular spectrum and portion of the laser beam directed into the transparent workpiece is a laser beam focal line and generates an induced absorption to produce a defect within the transparent workpiece. The laser beam focal line includes a wavelength .lamda., a spot size w.sub.o, a Rayleigh range Z.sub.R that is greater than F D .pi. w o 2 .lamda. , ##EQU00001## where F.sub.D is a dimensionless divergence factor comprising a value of 10 or greater, and an internal beam angle of greater than 10.degree. relative to a plane orthogonal to an impingement surface at an impingement location, such that the defect has a defect angle within the transparent workpiece of greater than 10.degree. relative to a plane orthogonal to the impingement surface at the impingement location.