Honeywell International Inc.
High temperature gas sensor

Abstract:

A gas sensor for sensing a gas of interest includes a ceramic carrier and a porous ceramic lid that is secured to the ceramic carrier. The porous ceramic lid and the ceramic carrier together define a sensor cavity. A gas sensor is situated in the sensor cavity and is spaced from the porous ceramic lid. The porous ceramic lid is configured to allow the gas of interest to move through at least part of the porous ceramic lid and into the sensor cavity to be sensed by the gas sensor. In some cases, the gas sensor is a MEMS gas sensor.