Honeywell International Inc.
MEMS VIBRATING BEAM ACCELEROMETER WITH BUILT-IN TEST ACTUATORS
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Abstract:
An example system comprising: a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising: a proof mass; and a first resonator mechanically coupled to the proof mass; a first electrode configured to apply a force to the proof mass.
Status:
Application
Type:
Utility
Filling date:
4 Dec 2020
Issue date:
9 Jun 2022