International Business Machines Corporation
Sub-ground rule e-Fuse structure

Abstract:

An e-Fuse device including a first electronic feature and a second electronic feature comprised of a conductive material, each of the first electronic feature and the second electronic feature having a width at least as great as a ground rule of a patterning process; and a fuse element comprised of the conductive material having a width less than the ground rule of the patterning process, the fuse element connecting a bottom portion of the first electronic feature and a bottom portion of the second electronic feature. Also disclosed is a method of making the e-Fuse device.