International Business Machines Corporation
Lateral semiconductor nanotube with hexagonal shape

Last updated:

Abstract:

A method of forming a semiconductor structure includes forming one or more fins disposed on a substrate, rounding surfaces of the one or more fins, forming faceted sidewalk from the rounded surfaces of the one or more fins, and forming a lateral semiconductor nanotube shell on the faceted sidewalk. The lateral semiconductor nanotube shell comprises a hexagonal shape.

Status:
Grant
Type:

Utility

Filling date:

1 Oct 2019

Issue date:

14 Sep 2021