International Business Machines Corporation
Lateral semiconductor nanotube with hexagonal shape
Last updated:
Abstract:
A method of forming a semiconductor structure includes forming one or more fins disposed on a substrate, rounding surfaces of the one or more fins, forming faceted sidewalk from the rounded surfaces of the one or more fins, and forming a lateral semiconductor nanotube shell on the faceted sidewalk. The lateral semiconductor nanotube shell comprises a hexagonal shape.
Status:
Grant
Type:
Utility
Filling date:
1 Oct 2019
Issue date:
14 Sep 2021