International Business Machines Corporation
Air gap metal tip electrostatic discharge protection

Abstract:

An air gap metal tip structure is provided for (ESD) protection. The structure includes first and second metal tips disposed along at least one horizontal axis that is parallel to a upper substrate and a lower substrate. The structure includes an air chamber formed between the upper and lower substrate within which the first metal tip and the second metal tip are disposed. The air chamber includes a portion between points of the metal tips. The structure includes an under fill level disposed between the lower and upper substrates, and above one or more layers having the metal tips. Oxygen trapped in the air chamber is converted into ozone responsive to an arc between the metal tips to dissipate the arc, and the ozone is decomposed back into the oxygen responsive to an absence of the arc between the metal tips to maintain the ESD protection for subsequent arcs.