International Business Machines Corporation
PHASE CHANGE MATERIAL SWITCH AND METHOD OF FABRICATING SAME
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Abstract:
A phase change material switch includes a phase change layer disposed on a metal liner. A gate dielectric layer is disposed on the phase change layer. A metal gate liner is disposed on the gate dielectric layer.
Status:
Application
Type:
Utility
Filling date:
17 Mar 2020
Issue date:
23 Sep 2021