International Business Machines Corporation
INTERCONNECTS WITH ENLARGED CONTACT AREA

Abstract:

An interconnect structure of an integrated circuit (IC) in which dielectric material defines upper and lower cavities and a via cavity communicative with the upper and lower cavities at upper and lower ends thereof. The interconnect structure includes first conductive material filling the upper and lower cavities to form upper and lower lines, respectively and second conductive material filling the via cavity from the upper end thereof to the lower end thereof to form a via electrically communicative with the upper and lower lines.