International Business Machines Corporation
Permanent wafer handlers with through silicon vias for thermalization and qubit modification

Last updated:

Abstract:

A quantum device includes a qubit chip having a plurality of qubits and an interposer attached to and electrically connected to the qubit chip. The device also includes a substrate handler attached to one side of the qubit chip or to one side of the interposer, or both so as to be thermally in contact with the qubit chip or the interposer, or both. The substrate handler includes a plurality of vias, at least a portion of plurality of vias being filled with a non-superconducting material, the non-superconducting material being selected to dissipate heat generated in the qubit chip, the interposer or both.

Status:
Grant
Type:

Utility

Filling date:

27 Nov 2019

Issue date:

26 Oct 2021