International Business Machines Corporation
Phase-change spatial light modulator

Abstract:

A spatial light modulator (SLM) is provided that includes an optical resonator (i.e., pixel) having nanoscale size. The optical resonator having nanoscale size includes a phase-change material such as, for example, a GeSbTe alloy, sandwiched between silicon nitride cladding layers. The phase-change material can undergo a crystalline-to-amorphous phase transition which is characterized by a large change in optical properties of the resonator.