International Business Machines Corporation
MICRO-ELECTROMECHANICAL DEVICE HAVING A SOFT MAGNETIC MATERIAL ELECTROLESSLY DEPOSITED ON A METAL LAYER

Abstract:

A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.