International Business Machines Corporation
Apparatus and method for measuring distance between fiducial features, such as magnetic transducers, to an accuracy of within one nanometer

Abstract:

An apparatus and method for precise and fast measurement of distances between fiducial features of samples such as transducers spans. In one approach, the apparatus includes a sample holder for holding a plurality of discrete samples having fiducial features thereon. The apparatus also includes a device configured to acquire locations of the fiducial features of the samples positioned in the sample holder. An x-y stage is configured to move the sample holder along an x-y plane for selectively positioning a first fiducial feature of a selected one of the samples to within .+-.10 micrometers or better of a predefined location in a field of view of the device in both x and y directions. A precision stage is configured to control an extent of movement of the selected one of the samples along an axis a predefined distance to an accuracy of about .+-.50 nanometers or better.