International Business Machines Corporation
Bottom conductive structure with a limited top contact area

Abstract:

A dielectric spacer is formed laterally adjacent to a bottom conductive structure. The dielectric spacer is configured to limit the area in which a subsequently formed top contact structure can contact the bottom conductive structure. In some embodiments, only a topmost surface of the bottom conductive structure is contacted by the top contact structure. In other embodiments, a topmost surface and an upper sidewall surface of the bottom conductive structure is contacted by the top contact structure.