International Business Machines Corporation
Self-aligned source and drain contacts

Abstract:

Self-aligned semiconductor FET device source and drain contacts and techniques for formation thereof are provided. In one aspect, a semiconductor FET device includes: at least one gate disposed on a substrate; source and drains on opposite sides of the at least one gate; gate spacers offsetting the at least one gate from the source and drains; lower source and drain contacts disposed on the source and drains; upper source and drain contacts disposed on the lower source and drain contacts; and a silicide present between the lower source and drain contacts and the upper source and drain contacts.