International Business Machines Corporation
Semiconductor structure with fully aligned vias

Abstract:

A method of forming a semiconductor structure includes forming one or more interconnect lines, the one or more interconnect lines including trenches of a first metal material surrounded by a first interlayer dielectric layer. The method also includes forming pillars of a second metal material different than the first metal material over the one or more interconnect lines utilizing a metal on metal growth process, and forming an etch stop dielectric layer, the pillars of the second metal material shaping the etch stop dielectric layer. The method further includes forming one or more vias to the one or more interconnect lines, the one or more vias being fully aligned to the one or more interconnect lines using the etch stop dielectric layer.