International Business Machines Corporation
Phase change material switch and method of fabricating same

Last updated:

Abstract:

A phase change material switch includes a phase change layer disposed on a metal liner. A gate dielectric layer is disposed on the phase change layer. A metal gate liner is disposed on the gate dielectric layer.

Status:
Grant
Type:

Utility

Filling date:

17 Mar 2020

Issue date:

26 Apr 2022