International Business Machines Corporation
Phase change material switch and method of fabricating same
Last updated:
Abstract:
A phase change material switch includes a phase change layer disposed on a metal liner. A gate dielectric layer is disposed on the phase change layer. A metal gate liner is disposed on the gate dielectric layer.
Status:
Grant
Type:
Utility
Filling date:
17 Mar 2020
Issue date:
26 Apr 2022