International Business Machines Corporation
METAL FLUORIDE ENCAPSULATION OF SUPERCONDUCTING DEVICES

Last updated:

Abstract:

Techniques regarding encapsulating one or more superconducting devices of a quantum processor are provided. For example, one or more embodiments described herein can regard a method that can comprise depositing a metal fluoride layer onto a superconducting resonator and a silicon substrate that can be comprised within a quantum processor. The superconducting resonator can be positioned on the silicon substrate. Also, the metal fluoride layer can coat the superconducting resonator.

Status:
Application
Type:

Utility

Filling date:

13 Oct 2021

Issue date:

12 May 2022