International Business Machines Corporation
CONDUCTIVE LINES WITH SUBTRACTIVE CUTS
Last updated:
Abstract:
Integrated chips include a dielectric layer that includes at least one trench and at least one plug region. A line is formed in the dielectric layer in the at least one trench and terminates at the plug region. A dielectric plug is formed in the plug region.
Status:
Application
Type:
Utility
Filling date:
24 Feb 2022
Issue date:
9 Jun 2022