International Business Machines Corporation
AREA-SELECTIVE DEPOSITION OF METAL NITRIDE TO FABRICATE DEVICES

Abstract:

Embodiments are provided for fabrication of superconducting devices using area-selective deposition of a metal nitride. In some embodiments, a method can include providing a thermally treated carbon layer, and selectively depositing a metal nitride using the thermally treated carbon layer for formation of a superconducting device.