International Business Machines Corporation
Reducing parasitic bottom electrode resistance of embedded MRAM

Abstract:

An embedded magnetoresistive random-access memory (MRAM) device including a portion of a metal wiring layer above a semiconductor device and a bottom electrode over the portion of the metal wiring layer. The embedded MRAM where the bottom electrode connects to a first portion of a bottom surface of a magnetoresistive random access memory pillar and a sidewall spacer is on the magnetoresistive random access memory pillar. The embedded MRAM device includes a ring of inner metal is on the portion of the metal wiring layer surrounding a portion of the bottom electrode.