International Business Machines Corporation
MULTI-LAYERED PACKAGING FOR SUPERCONDUCTING QUANTUM CIRCUITS

Abstract:

A quantum semiconductor device includes a qubit chip; an interposer chip, with a handler, including a through-silicon-via (TSV) coupled to a first side of the qubit chip. A multi-level wiring (MLW) layer contacts an underside of the interposer chip and coupling to the top side of the handler, the TSV facilitates an electrical signal connection between the MLW layer, a topside of the interposer chip and the qubit chip, wherein structure of the device mitigates signal cross-talk across respective lines of the MLW layer.