International Business Machines Corporation
Lithium drifted thin film transistors for neuromorphic computing
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Abstract:
A semiconductor device includes a field-effect transistor, a first back-end-of-line (BEOL) metallization level and a second BEOL metallization level disposed above the first BEOL metallization level. A portion of the field-effect transistor includes lithium therein, and the field-effect transistor is integrated between the first and second BEOL metallization levels. The portion of the field-effect transistor including the lithium therein can be a channel layer, or a source and/or drain region.
Status:
Grant
Type:
Utility
Filling date:
12 Dec 2018
Issue date:
13 Sep 2022