International Business Machines Corporation
Nanoscale granularity field effect transistor array
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Abstract:
An electrochemical sensor array includes a thermal oxide configured to interface with one or more analytes. There is a transistor device layer that includes a plurality of field effect transistors (FETs) on top of the thermal oxide. A contact and wiring structure layer is on top of the transistor device layer and operative to couple to control nodes of each of the plurality of FETs. The contact and wiring structure are on a side opposite to that of the thermal oxide.
Status:
Grant
Type:
Utility
Filling date:
2 May 2019
Issue date:
20 Sep 2022