International Business Machines Corporation
FULLY-ALIGNED SKIP-VIAS

Abstract:

An interconnect structure includes a first electrically conductive via portion on an upper surface of a substrate, the first electrically conductive via elongated along a first direction, and a first ILD material on the substrate and covering the first electrically conductive via portion. The first ILD material includes an ILD upper surface exposing a via surface of the first electrically conductive via portion. A second electrically conductive via portion is on the ILD upper surface and the via upper surface thereby defining a contact area between the first electrically conductive via portion and the second electrically conductive via portion. The second electrically conductive via portion elongated along a second direction orthogonal with respect to the first direction. A second ILD material is on the ILD upper surface to cover the second electrically conductive via portion. The first and second electrically conductive via portions are fully aligned at the contact area.