International Business Machines Corporation
SUBTRACTIVE MICROFABRICATION AND FUNCTIONALIZATION OF SUBSTRATES BY HYDRODYNAMIC FLOW CONFINEMENTS

Abstract:

Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).