International Business Machines Corporation
HYBRID FIELD EFFECT TRANSISTOR AND SURFACE ENHANCED INFRARED ABSORPTION BASED BIOSENSOR

Abstract:

A semiconductor structure, the semiconductor structure including a channel connecting a source on the semiconductor substrate and a drain on the semiconductor substrate, wherein the channel comprises a plasmonic resonator. A sensor including a plasmonic film, wherein the plasmonic film includes a sensitivity to a known analyte, a semiconductor structure including a source and a drain of a field effect transistor, and an electrical connection between the plasmonic film and a gate of the semiconductor structure. A method of forming a sensor including forming a field effect transistor ("FET") on a semiconductor substrate, the field effect transistor including a source, a drain, and a gate, where the gate includes a plasmonic resonator.