Illumina, Inc.
Passivating Fissures in Substrates

Abstract:

Provided in one example is a sensor having at least one fissure, the fissure being at least partially filled by at least one polymer formation extending vertically within a passivation layer. The polymer formation protects the underlying metal containing layer from corrosive solutions. Provided in another example is a method of forming the polymer formation in a fissure of a sensor.