Intel Corporation
RECONDITIONING OF REACTIVE PROCESS CHAMBER COMPONENTS FOR REDUCED SURFACE OXIDATION

Abstract:

Following use of a reactive process chamber, a component of the chamber, such as an edge ring that is to surround a workpiece during an etching process, may be refurbished through one or more residue removal operations followed by a surface texturing operation. The texturing operation may entail media blasting with a gaseous media propellant comprising a smaller fraction of O.sub.2 than air, such as high purity dry N.sub.2. The more inert gaseous media propellant may advantageously control oxygen contamination of a bulk metal, such as aluminum. Reconditioning may further entail a chemical treatment, which thins or completely removes, a surface oxide present after the texturing operation. The conditioned surface may then have a surface composition and texture that is capable of matching the performance of a previously unused chamber component.