Intel Corporation
Die with embedded communication cavity

Last updated:

Abstract:

Generally discussed herein are systems, devices, and methods that include a communication cavity. According to an example a device can include substrate with a first cavity formed therein, first and second antennas exposed in and enclosed by the cavity, and an interconnect structure formed in the substrate, the interconnect structure including alternating conductive material layers and inter-layer dielectric layers.

Status:
Grant
Type:

Utility

Filling date:

26 Sep 2016

Issue date:

21 Sep 2021