Intel Corporation
SOURCE/DRAIN REGIONS IN INTEGRATED CIRCUIT STRUCTURES
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Abstract:
Disclosed herein are source/drain regions in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC structure may include: an array of channel regions, including a first channel region and an adjacent second channel region; a first source/drain region proximate to the first channel region; a second source/drain region proximate to the second channel region; and an insulating material region at least partially between the first source/drain region and the second source/drain region.
Status:
Application
Type:
Utility
Filling date:
25 Mar 2020
Issue date:
30 Sep 2021