Intel Corporation
GATE SPACING IN INTEGRATED CIRCUIT STRUCTURES
Last updated:
Abstract:
Discussed herein is gate spacing in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC structure may include: a first gate metal having a longitudinal axis; a second gate metal, wherein the longitudinal axis of the first gate metal is aligned with a longitudinal axis of the second gate metal; a first dielectric material continuously around the first gate metal; and a second dielectric material continuously around the second gate metal, wherein the first dielectric material and the second dielectric material are present between the first gate metal and the second gate metal.
Status:
Application
Type:
Utility
Filling date:
26 Mar 2020
Issue date:
30 Sep 2021