Intel Corporation
Field-effect transistors with buried gates and methods of manufacturing the same

Last updated:

Abstract:

Field-effect transistors with buried gates and methods of manufacturing the same are disclosed. An example apparatus includes a source, a drain, and a semiconductor material positioned between the source and the drain. The example apparatus further includes a first gate positioned adjacent the semiconductor material. The example apparatus also includes a second gate positioned adjacent the semiconductor material. A portion of the semiconductor material is positioned between the first and second gates.

Status:
Grant
Type:

Utility

Filling date:

27 Dec 2017

Issue date:

26 Oct 2021