Intel Corporation
DIE STACK WITH REDUCED WARPAGE
Last updated:
Abstract:
A microelectronic device can include a polymer, a semiconductor, and a matching layer. The polymer can include a first coefficient of thermal expansion. The semiconductor can be coupled to the polymer layer. The matching layer can be adjacent the semiconductor, and the matching layer can include a second coefficient of thermal expansion that is about the same as the first coefficient of thermal expansion.
Status:
Application
Type:
Utility
Filling date:
2 Aug 2021
Issue date:
20 Jan 2022