Intel Corporation
Stacked transistors

Abstract:

A first interconnect layer is bonded to a first substrate. The first interconnect layer is deposited on a first device layer on a second device layer on a second substrate. The second device layer is revealed from the second substrate side. A first insulating layer is deposited on the revealed second device layer. A first opening is formed in the first insulating layer to expose a first portion of the second device layer. A contact region is formed on the exposed first portion of the second device layer.