Intel Corporation
Capacitor architectures in semiconductor devices
Last updated:
Abstract:
Embodiments herein describe techniques for a semiconductor device including a three dimensional capacitor. The three dimensional capacitor includes a pole, and one or more capacitor units stacked around the pole. A capacitor unit of the one or more capacitor units includes a first electrode surrounding and coupled to the pole, a dielectric layer surrounding the first electrode, and a second electrode surrounding the dielectric layer. Other embodiments may be described and/or claimed.
Status:
Grant
Type:
Utility
Filling date:
24 Mar 2020
Issue date:
1 Mar 2022