Intel Corporation
Device isolation
Last updated:
Abstract:
Disclosed herein are structures and techniques for device isolation in integrated circuit (IC) assemblies. In some embodiments, an IC assembly may include multiple transistors spaced apart by an isolation region. The isolation region may include a doped semiconductor body whose dopant concentration is greatest at one or more surfaces, or may include a material that is lattice-mismatched with material of the transistors, for example.
Status:
Grant
Type:
Utility
Filling date:
15 May 2017
Issue date:
1 Mar 2022