Intel Corporation
Integrated circuit components with dummy structures

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Abstract:

Disclosed herein are integrated circuit (IC) components with dummy structures, as well as related methods and devices. For example, in some embodiments, an IC component may include a dummy structure in a metallization stack. The dummy structure may include a dummy material having a higher Young's modulus than an interlayer dielectric of the metallization stack.

Status:
Grant
Type:

Utility

Filling date:

27 Sep 2017

Issue date:

10 May 2022