Intel Corporation
Integrated circuit components with dummy structures
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Abstract:
Disclosed herein are integrated circuit (IC) components with dummy structures, as well as related methods and devices. For example, in some embodiments, an IC component may include a dummy structure in a metallization stack. The dummy structure may include a dummy material having a higher Young's modulus than an interlayer dielectric of the metallization stack.
Status:
Grant
Type:
Utility
Filling date:
27 Sep 2017
Issue date:
10 May 2022