Intel Corporation
Integrated circuit components with substrate cavities

Last updated:

Abstract:

Disclosed herein are integrated circuit (IC) components with substrate cavities, as well as related techniques and assemblies. In some embodiments, an IC component may include a substrate, a device layer on the substrate, a plurality of interconnect layers on the device layer, and a cavity in the substrate.

Status:
Grant
Type:

Utility

Filling date:

9 Aug 2017

Issue date:

17 May 2022