Intel Corporation
Integrated circuit components with substrate cavities
Last updated:
Abstract:
Disclosed herein are integrated circuit (IC) components with substrate cavities, as well as related techniques and assemblies. In some embodiments, an IC component may include a substrate, a device layer on the substrate, a plurality of interconnect layers on the device layer, and a cavity in the substrate.
Status:
Grant
Type:
Utility
Filling date:
9 Aug 2017
Issue date:
17 May 2022