Intel Corporation
ELECTRONIC SUBSTRATES HAVING HETEROGENEOUS DIELECTRIC LAYERS
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Abstract:
An electronic substrate may be formed having at least one dielectric layer that is heterogeneous. The heterogeneous dielectric layer may comprise three separately formed materials that decouple the critical regions within a dielectric layer and allow for the optimization of desired interfacial properties, while minimizing the impact to the bulk requirements of the electronic substrate.
Status:
Application
Type:
Utility
Filling date:
30 Oct 2020
Issue date:
5 May 2022