Intel Corporation
POROUS FLI BUMPS FOR REDUCING BUMP THICKNESS VARIATION SENSITIVITY TO ENABLE BUMP PITCH SCALING

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Abstract:

Embodiments disclosed herein include electronic packages with fin pitch first level interconnects. In an embodiment, the electronic package comprises a die and a package substrate attached to the die by a plurality of first level interconnects (FLIs). In an embodiment, individual ones of the plurality of FLIs comprise, a first pad on the package substrate, a solder on the first pad, a second pad on the die, and a bump on the second pad. In an embodiment, the bump comprises a porous nanostructure, and the solder at least partially fills the porous nanostructure.

Status:
Application
Type:

Utility

Filling date:

25 Nov 2020

Issue date:

26 May 2022