Intel Corporation
Packaging for ultrasonic transducers
Last updated:
Abstract:
Aspects of the embodiments are directed to systems and devices that include a piezo-electric element comprising a top-side electrode and a bottom-side electrode; a metal contact pad electrically connected to the bottom-side electrode; an electrode electrically connected to the top-side electrode; and an encasement encasing the piezo-electric element. The piezo-electric element can be prepared to include steps and metallization for use in one or more types of packaging.
Status:
Grant
Type:
Utility
Filling date:
30 Dec 2016
Issue date:
9 Aug 2022