Intel Corporation
Method and apparatus for forming backside die planar devices and saw filter
Last updated:
Abstract:
Described is an apparatus which comprises: a backside of a first die having a redistribution layer (RDL); and one or more passive planar devices disposed on the backside, the one or more passive planar devices formed in the RDL.
Status:
Grant
Type:
Utility
Filling date:
11 Dec 2018
Issue date:
15 Jun 2021