Intel Corporation
Method and apparatus for forming backside die planar devices and saw filter

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Abstract:

Described is an apparatus which comprises: a backside of a first die having a redistribution layer (RDL); and one or more passive planar devices disposed on the backside, the one or more passive planar devices formed in the RDL.

Status:
Grant
Type:

Utility

Filling date:

11 Dec 2018

Issue date:

15 Jun 2021