Intel Corporation
Building stacked hollow channels for a three dimensional circuit device

Abstract:

A three dimensional stacked circuit device includes multiple decks of circuit elements, each deck including multiple tiers of circuit elements. Each deck includes a highly doped hollow channel extending through the deck. Below the first deck is a source conductor to drive activity of the circuit elements. Between each deck is a conductive stop layer that interconnects the hollow channel from one deck to the hollow channel of the deck adjacent to it. Thus, all hollow channels of all decks are electrically coupled to the source conductor.