Innoviz Technologies Ltd.
ELECTROOPTICAL SYSTEMS HAVING HEATING ELEMENTS

Abstract:

A microelectromechanical system (MEMS) mirror assembly may comprise a frame and a MEMS mirror coupled to the frame. The MEMS mirror assembly may also include at least one piezoelectric actuator including a body and a piezoelectric element. When subjected to an electrical field, the piezoelectric element may be configured to bend the body, thereby moving the MEMS mirror with respect to a plane of the frame. The MEMS mirror assembly may further include at least one heating resistor configured to heat the piezoelectric element when an electric current passes through the at least one heating resistor.