Illinois Tool Works Inc.
MASS FLOW CONTROLLER WITH ADVANCED BACK STREAMING DIAGNOSTICS

Abstract:

A diagnostics system comprising a controller for controlling operations of a mass flow controller. The controller is communicable coupled to at least one sensor and to a valve and tuned to control the valve based on a predetermined set point value and communication from the at least one sensor. The controller determines at least one predetermined value associated with a reverse flow of a fluid and either cause the controller to enter a hard fault or a safe state. The predetermined value of the flow is either a percentage of total flow or a percentage of total flow over a time period. The controller can log the date, time, and a device identifier in response to determining the at least one predetermined value. In addition, the diagnostics system can include a centralized controller configured to receive diagnostics data from a plurality of controllers and control operation of the controllers.