Illinois Tool Works Inc.
Passive damping system for mass flow controller

Abstract:

A mass flow controller includes an inlet, a flow path in which fluid passes, a mass flow sensor configured to provide a signal corresponding to mass flow of the fluid through the flow path; a control valve configured to regulate a flow of the fluid out of an outlet of the mass flow controller; and a passive damping system coupled to the control valve and configured to dissipate fluid flow induced vibrations introduced by the control valve assembly. The passive damping system includes a damping pad between a receiver section of a valve base and a diaphragm backer. The passive damping system can also include a damping washer. The passive damping system can include one or more plunger balls between the damping pad and the valve base or one or more wave springs.